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],
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],
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],
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}
],
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"en": "This survey examined opinions on health policy and health services in Finland as well as the respondents' own state of health. Additionally, the survey charted the handling of epidemics and other current topics of discussion in society. Questions relating to health and health services surveyed the respondents' satisfaction with life and trust in the Finnish health care system. The respondents were asked how fair or unfair they thought it was that people with better income could buy better healthcare, the extent to which they agreed with statements relating to the health care system, and how willing they would be to pay more taxes to improve the health care in Finland. The respondents were asked about public funding of different health measures, who should get treatment, and whether they thought getting access to health care was easier for some groups over others. Views were probed on the causes of severe health problems, alternative medicine and trust in doctors. The respondents were asked whether they had used the internet to look for health or medical information, and if yes, which topics they had researched (vaccinations, anxiety, healthy lifestyle). The respondents' opinions on the usefulness and reliability of information found on the internet were surveyed, and their views on the safety of vaccinations were charted. Next, the respondents were asked about (mental and physical) symptoms experienced, treatment received, reasons for forgoing medical treatment, and the probability of receiving the best possible treatment. Satisfaction with the health care system as well as the latest treatment when visiting a doctor and an alternative health care practitioner were investigated. Questions covered smoking and drinking habits, exercise and nutrition, perceived status of health, chronic illnesses and conditions, and height and weight. Other questions investigated what kind of health insurance the respondents had and who they thought should primarily provide health care services for the sick and elderly in Finland (e.g. government, private companies, family). Finally, the respondents' opinions on issues relating to the COVID-19 pandemic were examined. The respondents were asked whether they thought Finnish authorities should have the right to, for example, shut down businesses or demand that people stay at home at times of severe epidemics, as well as whether their trust in the health care system and the government had increased or decreased based on how the pandemic had been handled in Finland. Questions also surveyed how the respondents' work activity, income and social life had been affected by the pandemic. Background variables included, among others, the respondent's gender, age, level and length of education, status in employment, occupation, economic activity, marital status, spouse's status of employment and occupation, religious affiliation, political party choice in the previous parliamentary elections, household composition, monthly gross income, monthly gross household income and degree of urbanisation.",
"fi": "Tutkimuksessa käsiteltiin terveyteen ja yleiseen suomalaiseen terveydenhuoltoon liittyviä kysymyksiä. Lisäksi kysymykset käsittelivät epidemioiden hoitoa sekä yhteiskunnalliseen keskusteluun liittyviä aiheita. Terveyttä ja terveydenhuoltoa koskien vastaajille esitettiin väittämiä terveydenhoitojärjestelmästä, terveyspalveluista, terveysongelmista, vaihtoehtohoidoista ja lääkäreistä. Vastaajilta tiedusteltiin myös koetusta onnellisuudesta sekä luottamuksesta terveydenhuoltojärjestelmään. Kysyttiin myös onko oikeudenmukaista, että suurituloiset voivat ostaa paremman terveydenhoidon kuin pienituloiset. Tiedusteltiin halukkuudesta maksaa korkeampia veroja kaikkien suomalaisten terveydenhoidon parantamiseksi sekä pyydettiin mielipidettä joidenkin terveydenhoitoon liittyvien asioiden rahoittamisesta julkisin varoin. Vastaajilta kysyttiin myös, ovatko he käyttäneet internetiä terveyteen ja hyvinvointin liittyvään tiedonhakuun. Kysyttiin myös vastaajien kokemia terveysongelmia viimeisten neljän viikon ajalta sekä kuinka usein vastaaja on käynyt lääkärin tai vaihtoehtohoitoa tarjoavan henkilön vastaanotolla viimeksi kuluneiden 12 kuukauden aikana. Lisäksi samalta aikajaksolta haluttiin tietää, onko vastaaja jäänyt ilman tarvitsemaansa hoitoa ja kuinka todennäköisesti vastaaja saisi vakavaan sairauteen parasta mahdollista hoitoa haluamaltaan lääkäriltä. Kysyttiin myös tyytyväisyydestä Suomen terveydenhoitojärjestelmään yleensä sekä viimeksi saatuun hoitoon lääkärissä tai vaihtoehtohoidossa. Vastaajilta kysyttiin lisäksi tupakoinnista, liikunnasta, alkoholin nauttimisesta sekä hedelmien ja kasvisten syönnistä. Vastaajilta pyydettiin myös arviota omasta terveydentilasta ja kysyttiin, onko vastaajalla jokin pitkäaikaissairaus. Lopuksi tiedusteltiin vastaajan mielipidettä siihen, miten koronapandemiaa on hoidettu Suomessa, ja miten pandemia on vaikuttanut vastaajan ja hänen kotitaloutensa työllisyyteen ja taloudelliseen tilanteeseen. Taustamuuttujia olivat muun muassa sukupuoli, ikä, siviilisääty, koulutustaso ja koulutuksen pituus, nykyinen työmarkkina-asema, puolison nykyinen työmarkkina-asema, vastaajan ja puolison ammatti sekä perheen ja vastaajan tulot."
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Unless noted otherwise, all laser‑induced grooves were fabricated on the rear side of the wafer; measurements may be acquired from either the rear or front side as specified in each file description.\r\n\r\nFile Description\r\n\r\nEach file is named to correspond to a figure or part of a figure (e.g., an inset) in the original manuscript or supplementary material. The datasets used to generate the manuscript plots are provided in CSV format. Both unnormalized and normalized data are provided in the datasets that correspond to figures presenting normalized data. Normalization factors can be found in the descriptions below. Photoluminescence (PL) images are provided in RAW format (1024 × 1024 pixels, 32-bit, 4 MB). The scanning electron microscopy (SEM) image is provided in PNG format. \r\n\r\n A short description for each file is given below.\r\n\r\nFigure_1c_raw_image.png\r\n\r\nThis file contains a cross-sectional SEM image of the deepest laser-induced grooves. \r\n\r\nFigure_2a_data.csv\r\n\r\nThis file contains lower and upper modal quartiles and the mode of the PL counts corresponding to PL images of wafers from different process steps (A–V). Both unnormalized and normalized data are provided. The normalization factor corresponds to the mode of process step A (14137.459).\r\n\r\nFigure_2b_data.csv\r\n\r\nThis file contains line scan data (representing PL counts) across PL images taken after process steps C and J. Both unnormalized and normalized data are provided. The normalization factor corresponds to the first measured pixel of the wafer from process step C (11239).\r\n\r\nFigure_3a_data.csv\r\n\r\nThis file contains lower and upper modal quartiles and the mode of the PL counts corresponding to PL images of wafers treated with varying hydrofluoric acid (HF) concentrations for different immersion times. Both unnormalized and normalized data are provided. The normalization factor corresponds to the mode of the wafer treated with 1% HF for 2.5 min (28467.55).\r\n\r\nFigure_3b_data.csv\r\n\r\nThis file contains line scan data (representing PL counts) across PL images of wafers treated with varying HF concentrations for different immersion times. Both unnormalized and normalized data are provided. The normalization factor corresponds to the first measured pixel of the wafer treated with 1% HF for 2.5 min (4409.8).\r\n\r\nFigure_4a_PLI_raw_image.raw\r\n\r\nThis file contains a PL image taken from the rear side of a wafer with laser-induced grooves before HF treatment.\r\n\r\nFigure_4a_inset_data.csv\r\n\r\nThis file contains data for the inset of Figure 4a. The data provides occurrences (pixel counts) for the PL count range 30000–39960.938 from the PL image provided in “Figure_4a_PLI_raw_image.raw.” The PL count range is divided into 256 bins, which corresponds to a step size of 39.062.\r\n\r\nFigure_4b_data.csv\r\n\r\nThis file contains line scan data (representing PL counts) across rows (A–D) of laser-induced grooves. Line scans are provided before HF treatment (as-received) from both the rear and front sides of the wafer, as well as after HF treatment from the front side of the wafer. Gaps in the data indicate transitions between scans (e.g. from A to B). Both unnormalized and normalized data are provided. All scans are normalized to their first measured pixel: 23052.7 (After HF treatment, front), 37286 (As-received, rear) and 39309 (As-received, front). In the manuscript figure (with arbitrary PL counts), the line scans were vertically offset (y-axis) to avoid overlap.\r\n\r\nFigure_5_data.csv\r\n\r\nThis file contains the PL count differences between laser-induced grooves of different depths (5 to 220 µm) and the background signal, expressed as percentages. The values are provided before HF treatment (as-received) from both the rear and front sides of the wafer, as well as after HF treatment from the front side of the wafer. \r\n\r\nFigure_6a_data.csv\r\n\r\nThis file contains line scan data (PL counts) over a selected 220 µm deep and 10 mm wide laser-induced groove from the rear side of the wafer, measured at different air exposure times after HF treatment. Both unnormalized and normalized data are provided. All scans are normalized to their first measured pixel: 25133.652 (t = 0 min), 3100.167 (t = 55 min) and 9109.906 (t = 1 week).\r\n\r\nFigure_6a_0min_raw_image.raw\r\n\r\nThis file contains a PL image of laser-induced grooves from the rear side of the wafer, acquired with a high‑magnification lens immediately upon air exposure (t = 0 min) after HF treatment. The groove shown in the inset of Figure 6a corresponds to the middle groove.\r\n\r\nFigure_6a_1week_raw_image.raw\r\n\r\nThis file contains a PL image of laser-induced grooves from the rear side of the wafer, acquired with a high‑magnification lens after 1 week of air exposure following HF treatment. The groove shown in the inset of Figure 6a corresponds to the middle groove.\r\n\r\nFigure_6b_data.csv\r\n\r\nThis file contains line scan data (PL counts) over a selected ~10 µm deep and 10 mm wide laser-induced groove from the front side of the wafer, measured at different air exposure times after HF treatment. Both unnormalized and normalized data are provided. All scans are normalized to their first measured pixel: 1102.558 (t = 90 min), 16798.551 (t = 23 h) and 7235.617 (t = 1 week).\r\n\r\nFigure_6b_90min_raw_image.raw\r\n\r\nThis file contains a PL image of laser-induced grooves from the front side of the wafer, acquired with a high‑magnification lens after 90 min of air exposure following HF treatment. The groove shown in the inset of Figure 6b corresponds to the groove on the left.\r\n\r\nFigure_6b_1week_raw_image.raw\r\n\r\nThis file contains a PL image of laser-induced grooves from the front side of the wafer, acquired with a high‑magnification lens after 1 week of air exposure following HF treatment. The groove shown in the inset of Figure 6b corresponds to the bottom groove.\r\n\r\nFigure_7a_raw_image.raw\r\n\r\nThis file contains a PL image of a wafer known to have stacking faults, acquired after HF treatment.\r\n\r\nFigure_7b_raw_image.raw\r\n\r\nThis file contains a PL image of a wafer known to have stacking faults, acquired after HF treatment.\r\n\r\nFigure_S1a_data.csv\r\n\r\nThis file contains line scan data (representing PL counts) across PL images of wafers stored in different ambient conditions after HF treatment. Both unnormalized and normalized data are provided. The normalization factor corresponds to the first measured pixel of the wafer stored in vacuum (10066.2).\r\n\r\nFigure_S1b_data.csv\r\n\r\nThis file contains average PL count modes from PL images of wafers dried by different methods as a part of HF treatment. Both unnormalized and normalized data are provided. The normalization factor corresponds to the average PL count mode of the wafers dried with N2 flow (9502.171).\r\n\r\nFigure_S1c_1.5min_without_dumping_raw_image.raw\r\n\r\nThis file contains a PL image of a wafer rinsed in DIW for 1.5 min without dumping as a part of HF treatment.\r\n\r\nFigure_S1c_3_dumping_cycles_raw_image.raw\r\n\r\nThis file contains a PL image of a wafer rinsed in DIW with 3 dumping cycles as a part of HF treatment.\r\n\r\nCredit\r\n\r\nWhen using the datasets or raw images, please cite the original paper when published.\r\n\r\nAcknowledgements\r\n\r\nThis work was supported by The Finnish Research Impact Foundation, grant number 389. The authors acknowledge the provision of facilities and technical support by Micronova Nanofabrication Centre in Espoo, Finland within the OtaNano research infrastructure at Aalto University."
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